JPH03104731U - - Google Patents

Info

Publication number
JPH03104731U
JPH03104731U JP1342190U JP1342190U JPH03104731U JP H03104731 U JPH03104731 U JP H03104731U JP 1342190 U JP1342190 U JP 1342190U JP 1342190 U JP1342190 U JP 1342190U JP H03104731 U JPH03104731 U JP H03104731U
Authority
JP
Japan
Prior art keywords
pull
diffusion furnace
out rod
semiconductor diffusion
quartz jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1342190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1342190U priority Critical patent/JPH03104731U/ja
Publication of JPH03104731U publication Critical patent/JPH03104731U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP1342190U 1990-02-14 1990-02-14 Pending JPH03104731U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1342190U JPH03104731U (en]) 1990-02-14 1990-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1342190U JPH03104731U (en]) 1990-02-14 1990-02-14

Publications (1)

Publication Number Publication Date
JPH03104731U true JPH03104731U (en]) 1991-10-30

Family

ID=31516836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1342190U Pending JPH03104731U (en]) 1990-02-14 1990-02-14

Country Status (1)

Country Link
JP (1) JPH03104731U (en])

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